5/7/2012	9:27:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2012	9:27:05 AM	Recipe started at 9:27 AM
5/7/2012	9:27:05 AM	Helium valve closed
5/7/2012	9:27:05 AM	H2 valve closed
5/7/2012	9:27:05 AM	BCl3 valve closed
5/7/2012	9:27:05 AM	PH3 valve closed
5/7/2012	9:27:05 AM	SiCl4 pre valve closed
5/7/2012	9:27:05 AM	SiCl4 post valve closed
5/7/2012	9:27:05 AM	Main Vac valve closed
5/7/2012	9:27:05 AM	Bypass valve closed
5/7/2012	9:27:05 AM	Bubbler valve closed
5/7/2012	9:27:05 AM	Helium MFC set to  0.000000
5/7/2012	9:27:05 AM	H2 MFC set to  0.000000
5/7/2012	9:27:05 AM	BCl3 MFC set to  0.000000
5/7/2012	9:27:05 AM	PH3 MFC set to  0.000000
5/7/2012	9:27:05 AM	SiCl4 MFC set to  0.000000
5/7/2012	9:27:05 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	9:27:05 AM	Tube furnace set to 0
5/7/2012	9:27:08 AM	H2 valve closed
5/7/2012	9:27:08 AM	BCl3 valve closed
5/7/2012	9:27:08 AM	PH3 valve closed
5/7/2012	9:27:08 AM	SiCl4 pre valve closed
5/7/2012	9:27:08 AM	SiCl4 post valve closed
5/7/2012	9:27:08 AM	Main Vac valve closed
5/7/2012	9:27:08 AM	Bypass valve closed
5/7/2012	9:27:08 AM	Bubbler valve closed
5/7/2012	9:27:08 AM	Helium valve opened
5/7/2012	9:27:08 AM	Helium MFC set to  500.000000
5/7/2012	9:27:08 AM	H2 MFC set to  0.000000
5/7/2012	9:27:08 AM	BCl3 MFC set to  0.000000
5/7/2012	9:27:08 AM	PH3 MFC set to  0.000000
5/7/2012	9:27:08 AM	SiCl4 MFC set to  0.000000
5/7/2012	9:27:08 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	9:27:08 AM	Tube furnace set to 0
5/7/2012	9:28:21 AM	Helium valve closed
5/7/2012	9:28:21 AM	H2 valve closed
5/7/2012	9:28:21 AM	BCl3 valve closed
5/7/2012	9:28:21 AM	PH3 valve closed
5/7/2012	9:28:21 AM	SiCl4 pre valve closed
5/7/2012	9:28:21 AM	SiCl4 post valve closed
5/7/2012	9:28:21 AM	Main Vac valve closed
5/7/2012	9:28:21 AM	Bypass valve closed
5/7/2012	9:28:21 AM	Bubbler valve closed
5/7/2012	9:28:21 AM	Helium MFC set to  0.000000
5/7/2012	9:28:21 AM	H2 MFC set to  0.000000
5/7/2012	9:28:21 AM	BCl3 MFC set to  0.000000
5/7/2012	9:28:21 AM	PH3 MFC set to  0.000000
5/7/2012	9:28:21 AM	SiCl4 MFC set to  0.000000
5/7/2012	9:28:21 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	9:28:21 AM	Tube furnace set to 0
5/7/2012	9:28:22 AM	Run finished at 9:28 AM
5/7/2012	9:28:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2012	9:30:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2012	9:30:22 AM	Recipe started at 9:30 AM
5/7/2012	9:30:22 AM	Helium valve closed
5/7/2012	9:30:22 AM	H2 valve closed
5/7/2012	9:30:22 AM	BCl3 valve closed
5/7/2012	9:30:22 AM	PH3 valve closed
5/7/2012	9:30:22 AM	SiCl4 pre valve closed
5/7/2012	9:30:22 AM	SiCl4 post valve closed
5/7/2012	9:30:22 AM	Main Vac valve closed
5/7/2012	9:30:22 AM	Bubbler valve closed
5/7/2012	9:30:22 AM	Bypass valve opened
5/7/2012	9:30:22 AM	Helium MFC set to  0.000000
5/7/2012	9:30:22 AM	H2 MFC set to  0.000000
5/7/2012	9:30:22 AM	BCl3 MFC set to  0.000000
5/7/2012	9:30:22 AM	PH3 MFC set to  0.000000
5/7/2012	9:30:22 AM	SiCl4 MFC set to  0.000000
5/7/2012	9:30:22 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	9:30:22 AM	Tube furnace set to 0
5/7/2012	9:31:28 AM	Helium valve closed
5/7/2012	9:31:28 AM	H2 valve closed
5/7/2012	9:31:28 AM	BCl3 valve closed
5/7/2012	9:31:28 AM	PH3 valve closed
5/7/2012	9:31:28 AM	SiCl4 pre valve closed
5/7/2012	9:31:28 AM	SiCl4 post valve closed
5/7/2012	9:31:28 AM	Main Vac valve closed
5/7/2012	9:31:28 AM	Bubbler valve closed
5/7/2012	9:31:28 AM	Bypass valve opened
5/7/2012	9:31:28 AM	Helium MFC set to  0.000000
5/7/2012	9:31:29 AM	H2 MFC set to  0.000000
5/7/2012	9:31:29 AM	BCl3 MFC set to  0.000000
5/7/2012	9:31:29 AM	PH3 MFC set to  0.000000
5/7/2012	9:31:29 AM	SiCl4 MFC set to  0.000000
5/7/2012	9:31:29 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	9:31:29 AM	Tube furnace set to 0
5/7/2012	9:32:29 AM	Helium valve closed
5/7/2012	9:32:29 AM	H2 valve closed
5/7/2012	9:32:29 AM	BCl3 valve closed
5/7/2012	9:32:29 AM	PH3 valve closed
5/7/2012	9:32:29 AM	SiCl4 pre valve closed
5/7/2012	9:32:29 AM	SiCl4 post valve closed
5/7/2012	9:32:29 AM	Bypass valve closed
5/7/2012	9:32:29 AM	Bubbler valve closed
5/7/2012	9:32:29 AM	Main Vac valve opened
5/7/2012	9:32:29 AM	Helium MFC set to  0.000000
5/7/2012	9:32:29 AM	H2 MFC set to  0.000000
5/7/2012	9:32:29 AM	BCl3 MFC set to  0.000000
5/7/2012	9:32:29 AM	PH3 MFC set to  0.000000
5/7/2012	9:32:29 AM	SiCl4 MFC set to  0.000000
5/7/2012	9:32:29 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	9:32:29 AM	Tube furnace set to 0
5/7/2012	9:32:30 AM	Run finished at 9:32 AM
5/7/2012	9:32:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2012	9:32:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2012	9:32:46 AM	Recipe started at 9:32 AM
5/7/2012	9:32:46 AM	Helium valve closed
5/7/2012	9:32:46 AM	H2 valve closed
5/7/2012	9:32:46 AM	BCl3 valve closed
5/7/2012	9:32:46 AM	PH3 valve closed
5/7/2012	9:32:46 AM	SiCl4 pre valve closed
5/7/2012	9:32:46 AM	SiCl4 post valve closed
5/7/2012	9:32:46 AM	Main Vac valve closed
5/7/2012	9:32:46 AM	Bypass valve closed
5/7/2012	9:32:46 AM	Bubbler valve closed
5/7/2012	9:32:46 AM	Helium MFC set to  0.000000
5/7/2012	9:32:46 AM	H2 MFC set to  0.000000
5/7/2012	9:32:46 AM	BCl3 MFC set to  0.000000
5/7/2012	9:32:46 AM	PH3 MFC set to  0.000000
5/7/2012	9:32:46 AM	SiCl4 MFC set to  0.000000
5/7/2012	9:32:46 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	9:32:46 AM	Tube furnace set to 0
5/7/2012	9:32:49 AM	H2 valve closed
5/7/2012	9:32:49 AM	BCl3 valve closed
5/7/2012	9:32:49 AM	PH3 valve closed
5/7/2012	9:32:49 AM	SiCl4 pre valve closed
5/7/2012	9:32:49 AM	SiCl4 post valve closed
5/7/2012	9:32:49 AM	Main Vac valve closed
5/7/2012	9:32:49 AM	Bypass valve closed
5/7/2012	9:32:49 AM	Bubbler valve closed
5/7/2012	9:32:49 AM	Helium valve opened
5/7/2012	9:32:49 AM	Helium MFC set to  500.000000
5/7/2012	9:32:49 AM	H2 MFC set to  0.000000
5/7/2012	9:32:49 AM	BCl3 MFC set to  0.000000
5/7/2012	9:32:49 AM	PH3 MFC set to  0.000000
5/7/2012	9:32:49 AM	SiCl4 MFC set to  0.000000
5/7/2012	9:32:49 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	9:32:49 AM	Tube furnace set to 0
5/7/2012	9:34:03 AM	Helium valve closed
5/7/2012	9:34:03 AM	H2 valve closed
5/7/2012	9:34:03 AM	BCl3 valve closed
5/7/2012	9:34:03 AM	PH3 valve closed
5/7/2012	9:34:03 AM	SiCl4 pre valve closed
5/7/2012	9:34:03 AM	SiCl4 post valve closed
5/7/2012	9:34:03 AM	Main Vac valve closed
5/7/2012	9:34:03 AM	Bypass valve closed
5/7/2012	9:34:03 AM	Bubbler valve closed
5/7/2012	9:34:03 AM	Helium MFC set to  0.000000
5/7/2012	9:34:03 AM	H2 MFC set to  0.000000
5/7/2012	9:34:03 AM	BCl3 MFC set to  0.000000
5/7/2012	9:34:03 AM	PH3 MFC set to  0.000000
5/7/2012	9:34:03 AM	SiCl4 MFC set to  0.000000
5/7/2012	9:34:04 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	9:34:04 AM	Tube furnace set to 0
5/7/2012	9:34:05 AM	Run finished at 9:34 AM
5/7/2012	9:34:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2012	9:38:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2012	9:38:02 AM	Recipe started at 9:38 AM
5/7/2012	9:38:02 AM	Helium valve closed
5/7/2012	9:38:02 AM	H2 valve closed
5/7/2012	9:38:02 AM	BCl3 valve closed
5/7/2012	9:38:02 AM	PH3 valve closed
5/7/2012	9:38:02 AM	SiCl4 pre valve closed
5/7/2012	9:38:02 AM	SiCl4 post valve closed
5/7/2012	9:38:02 AM	Main Vac valve closed
5/7/2012	9:38:02 AM	Bubbler valve closed
5/7/2012	9:38:02 AM	Bypass valve opened
5/7/2012	9:38:02 AM	Helium MFC set to  0.000000
5/7/2012	9:38:02 AM	H2 MFC set to  0.000000
5/7/2012	9:38:02 AM	BCl3 MFC set to  0.000000
5/7/2012	9:38:02 AM	PH3 MFC set to  0.000000
5/7/2012	9:38:02 AM	SiCl4 MFC set to  0.000000
5/7/2012	9:38:02 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	9:38:02 AM	Tube furnace set to 0
5/7/2012	9:39:11 AM	Helium valve closed
5/7/2012	9:39:11 AM	H2 valve closed
5/7/2012	9:39:11 AM	BCl3 valve closed
5/7/2012	9:39:11 AM	PH3 valve closed
5/7/2012	9:39:11 AM	SiCl4 pre valve closed
5/7/2012	9:39:11 AM	SiCl4 post valve closed
5/7/2012	9:39:11 AM	Main Vac valve closed
5/7/2012	9:39:11 AM	Bubbler valve closed
5/7/2012	9:39:11 AM	Bypass valve opened
5/7/2012	9:39:11 AM	Helium MFC set to  0.000000
5/7/2012	9:39:11 AM	H2 MFC set to  0.000000
5/7/2012	9:39:11 AM	BCl3 MFC set to  0.000000
5/7/2012	9:39:11 AM	PH3 MFC set to  0.000000
5/7/2012	9:39:11 AM	SiCl4 MFC set to  0.000000
5/7/2012	9:39:11 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	9:39:11 AM	Tube furnace set to 0
5/7/2012	9:40:11 AM	Helium valve closed
5/7/2012	9:40:11 AM	H2 valve closed
5/7/2012	9:40:11 AM	BCl3 valve closed
5/7/2012	9:40:11 AM	PH3 valve closed
5/7/2012	9:40:11 AM	SiCl4 pre valve closed
5/7/2012	9:40:11 AM	SiCl4 post valve closed
5/7/2012	9:40:11 AM	Bypass valve closed
5/7/2012	9:40:11 AM	Bubbler valve closed
5/7/2012	9:40:11 AM	Main Vac valve opened
5/7/2012	9:40:11 AM	Helium MFC set to  0.000000
5/7/2012	9:40:11 AM	H2 MFC set to  0.000000
5/7/2012	9:40:11 AM	BCl3 MFC set to  0.000000
5/7/2012	9:40:11 AM	PH3 MFC set to  0.000000
5/7/2012	9:40:11 AM	SiCl4 MFC set to  0.000000
5/7/2012	9:40:11 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	9:40:11 AM	Tube furnace set to 0
5/7/2012	9:40:12 AM	Run finished at 9:40 AM
5/7/2012	9:40:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2012	10:02:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/7/2012	10:03:04 AM	Recipe started at 10:02 AM
5/7/2012	10:03:04 AM	Helium valve closed
5/7/2012	10:03:04 AM	H2 valve closed
5/7/2012	10:03:04 AM	BCl3 valve closed
5/7/2012	10:03:04 AM	PH3 valve closed
5/7/2012	10:03:04 AM	SiCl4 pre valve closed
5/7/2012	10:03:04 AM	SiCl4 post valve closed
5/7/2012	10:03:04 AM	Main Vac valve closed
5/7/2012	10:03:04 AM	Bubbler valve closed
5/7/2012	10:03:04 AM	Bypass valve opened
5/7/2012	10:03:04 AM	Helium MFC set to  0.000000
5/7/2012	10:03:04 AM	H2 MFC set to  0.000000
5/7/2012	10:03:04 AM	BCl3 MFC set to  0.000000
5/7/2012	10:03:04 AM	PH3 MFC set to  0.000000
5/7/2012	10:03:04 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:03:04 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:03:04 AM	Tube furnace set to 0
5/7/2012	10:03:04 AM	Helium valve closed
5/7/2012	10:03:04 AM	H2 valve closed
5/7/2012	10:03:04 AM	BCl3 valve closed
5/7/2012	10:03:04 AM	PH3 valve closed
5/7/2012	10:03:04 AM	SiCl4 pre valve closed
5/7/2012	10:03:04 AM	SiCl4 post valve closed
5/7/2012	10:03:04 AM	Main Vac valve closed
5/7/2012	10:03:04 AM	Bubbler valve closed
5/7/2012	10:03:04 AM	Bypass valve opened
5/7/2012	10:03:04 AM	Helium MFC set to  0.000000
5/7/2012	10:03:04 AM	H2 MFC set to  0.000000
5/7/2012	10:03:04 AM	BCl3 MFC set to  0.000000
5/7/2012	10:03:04 AM	PH3 MFC set to  0.000000
5/7/2012	10:03:04 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:03:04 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:03:05 AM	Tube furnace set to 0
5/7/2012	10:03:06 AM	Helium valve closed
5/7/2012	10:03:06 AM	H2 valve closed
5/7/2012	10:03:06 AM	BCl3 valve closed
5/7/2012	10:03:06 AM	PH3 valve closed
5/7/2012	10:03:06 AM	SiCl4 pre valve closed
5/7/2012	10:03:06 AM	SiCl4 post valve closed
5/7/2012	10:03:06 AM	Bypass valve closed
5/7/2012	10:03:06 AM	Bubbler valve closed
5/7/2012	10:03:06 AM	Main Vac valve opened
5/7/2012	10:03:06 AM	Helium MFC set to  0.000000
5/7/2012	10:03:06 AM	H2 MFC set to  0.000000
5/7/2012	10:03:06 AM	BCl3 MFC set to  0.000000
5/7/2012	10:03:06 AM	PH3 MFC set to  0.000000
5/7/2012	10:03:06 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:03:06 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:03:06 AM	Tube furnace set to 0
5/7/2012	10:03:07 AM	H2 valve closed
5/7/2012	10:03:07 AM	BCl3 valve closed
5/7/2012	10:03:07 AM	PH3 valve closed
5/7/2012	10:03:07 AM	SiCl4 pre valve closed
5/7/2012	10:03:07 AM	SiCl4 post valve closed
5/7/2012	10:03:07 AM	Bypass valve closed
5/7/2012	10:03:07 AM	Bubbler valve closed
5/7/2012	10:03:07 AM	Helium valve opened
5/7/2012	10:03:07 AM	Main Vac valve opened
5/7/2012	10:03:07 AM	Helium MFC set to  20.000000
5/7/2012	10:03:07 AM	H2 MFC set to  0.000000
5/7/2012	10:03:07 AM	BCl3 MFC set to  0.000000
5/7/2012	10:03:07 AM	PH3 MFC set to  0.000000
5/7/2012	10:03:07 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:03:07 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:03:07 AM	Tube furnace set to 0
5/7/2012	10:03:37 AM	Helium valve closed
5/7/2012	10:03:37 AM	H2 valve closed
5/7/2012	10:03:37 AM	BCl3 valve closed
5/7/2012	10:03:37 AM	PH3 valve closed
5/7/2012	10:03:37 AM	SiCl4 pre valve closed
5/7/2012	10:03:37 AM	SiCl4 post valve closed
5/7/2012	10:03:37 AM	Bypass valve closed
5/7/2012	10:03:37 AM	Bubbler valve closed
5/7/2012	10:03:37 AM	Main Vac valve opened
5/7/2012	10:03:37 AM	Helium MFC set to  0.000000
5/7/2012	10:03:37 AM	H2 MFC set to  0.000000
5/7/2012	10:03:37 AM	BCl3 MFC set to  0.000000
5/7/2012	10:03:37 AM	PH3 MFC set to  0.000000
5/7/2012	10:03:37 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:03:37 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:03:37 AM	Tube furnace set to 0
5/7/2012	10:04:07 AM	H2 valve closed
5/7/2012	10:04:07 AM	BCl3 valve closed
5/7/2012	10:04:07 AM	PH3 valve closed
5/7/2012	10:04:07 AM	SiCl4 pre valve closed
5/7/2012	10:04:07 AM	SiCl4 post valve closed
5/7/2012	10:04:07 AM	Bypass valve closed
5/7/2012	10:04:07 AM	Bubbler valve closed
5/7/2012	10:04:07 AM	Helium valve opened
5/7/2012	10:04:07 AM	Main Vac valve opened
5/7/2012	10:04:07 AM	Helium MFC set to  20.000000
5/7/2012	10:04:07 AM	H2 MFC set to  0.000000
5/7/2012	10:04:07 AM	BCl3 MFC set to  0.000000
5/7/2012	10:04:07 AM	PH3 MFC set to  0.000000
5/7/2012	10:04:07 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:04:07 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:04:08 AM	Tube furnace set to 0
5/7/2012	10:04:38 AM	Helium valve closed
5/7/2012	10:04:38 AM	H2 valve closed
5/7/2012	10:04:38 AM	BCl3 valve closed
5/7/2012	10:04:38 AM	PH3 valve closed
5/7/2012	10:04:38 AM	SiCl4 pre valve closed
5/7/2012	10:04:38 AM	SiCl4 post valve closed
5/7/2012	10:04:38 AM	Bypass valve closed
5/7/2012	10:04:38 AM	Bubbler valve closed
5/7/2012	10:04:38 AM	Main Vac valve opened
5/7/2012	10:04:38 AM	Helium MFC set to  0.000000
5/7/2012	10:04:38 AM	H2 MFC set to  0.000000
5/7/2012	10:04:38 AM	BCl3 MFC set to  0.000000
5/7/2012	10:04:38 AM	PH3 MFC set to  0.000000
5/7/2012	10:04:38 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:04:38 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:04:38 AM	Tube furnace set to 0
5/7/2012	10:05:08 AM	H2 valve closed
5/7/2012	10:05:08 AM	BCl3 valve closed
5/7/2012	10:05:08 AM	PH3 valve closed
5/7/2012	10:05:08 AM	SiCl4 pre valve closed
5/7/2012	10:05:08 AM	SiCl4 post valve closed
5/7/2012	10:05:08 AM	Bypass valve closed
5/7/2012	10:05:08 AM	Bubbler valve closed
5/7/2012	10:05:08 AM	Helium valve opened
5/7/2012	10:05:08 AM	Main Vac valve opened
5/7/2012	10:05:08 AM	Helium MFC set to  20.000000
5/7/2012	10:05:08 AM	H2 MFC set to  0.000000
5/7/2012	10:05:08 AM	BCl3 MFC set to  0.000000
5/7/2012	10:05:08 AM	PH3 MFC set to  0.000000
5/7/2012	10:05:08 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:05:08 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:05:08 AM	Tube furnace set to 0
5/7/2012	10:05:38 AM	Helium valve closed
5/7/2012	10:05:38 AM	H2 valve closed
5/7/2012	10:05:38 AM	BCl3 valve closed
5/7/2012	10:05:38 AM	PH3 valve closed
5/7/2012	10:05:38 AM	SiCl4 pre valve closed
5/7/2012	10:05:38 AM	SiCl4 post valve closed
5/7/2012	10:05:38 AM	Bypass valve closed
5/7/2012	10:05:38 AM	Bubbler valve closed
5/7/2012	10:05:38 AM	Main Vac valve opened
5/7/2012	10:05:38 AM	Helium MFC set to  0.000000
5/7/2012	10:05:38 AM	H2 MFC set to  0.000000
5/7/2012	10:05:38 AM	BCl3 MFC set to  0.000000
5/7/2012	10:05:38 AM	PH3 MFC set to  0.000000
5/7/2012	10:05:38 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:05:38 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:05:38 AM	Tube furnace set to 0
5/7/2012	10:06:08 AM	H2 valve closed
5/7/2012	10:06:08 AM	BCl3 valve closed
5/7/2012	10:06:08 AM	PH3 valve closed
5/7/2012	10:06:08 AM	SiCl4 pre valve closed
5/7/2012	10:06:08 AM	SiCl4 post valve closed
5/7/2012	10:06:08 AM	Bypass valve closed
5/7/2012	10:06:08 AM	Bubbler valve closed
5/7/2012	10:06:08 AM	Helium valve opened
5/7/2012	10:06:08 AM	Main Vac valve opened
5/7/2012	10:06:08 AM	Helium MFC set to  20.000000
5/7/2012	10:06:08 AM	H2 MFC set to  0.000000
5/7/2012	10:06:08 AM	BCl3 MFC set to  0.000000
5/7/2012	10:06:08 AM	PH3 MFC set to  0.000000
5/7/2012	10:06:08 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:06:08 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:06:09 AM	Tube furnace set to 0
5/7/2012	10:06:39 AM	Helium valve closed
5/7/2012	10:06:39 AM	H2 valve closed
5/7/2012	10:06:39 AM	BCl3 valve closed
5/7/2012	10:06:39 AM	PH3 valve closed
5/7/2012	10:06:39 AM	SiCl4 pre valve closed
5/7/2012	10:06:39 AM	SiCl4 post valve closed
5/7/2012	10:06:39 AM	Bypass valve closed
5/7/2012	10:06:39 AM	Bubbler valve closed
5/7/2012	10:06:39 AM	Main Vac valve opened
5/7/2012	10:06:39 AM	Helium MFC set to  0.000000
5/7/2012	10:06:39 AM	H2 MFC set to  0.000000
5/7/2012	10:06:39 AM	BCl3 MFC set to  0.000000
5/7/2012	10:06:39 AM	PH3 MFC set to  0.000000
5/7/2012	10:06:39 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:06:39 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:06:39 AM	Tube furnace set to 0
5/7/2012	10:07:09 AM	H2 valve closed
5/7/2012	10:07:09 AM	BCl3 valve closed
5/7/2012	10:07:09 AM	PH3 valve closed
5/7/2012	10:07:09 AM	SiCl4 pre valve closed
5/7/2012	10:07:09 AM	SiCl4 post valve closed
5/7/2012	10:07:09 AM	Bypass valve closed
5/7/2012	10:07:09 AM	Bubbler valve closed
5/7/2012	10:07:09 AM	Helium valve opened
5/7/2012	10:07:09 AM	Main Vac valve opened
5/7/2012	10:07:09 AM	Helium MFC set to  20.000000
5/7/2012	10:07:09 AM	H2 MFC set to  0.000000
5/7/2012	10:07:09 AM	BCl3 MFC set to  0.000000
5/7/2012	10:07:09 AM	PH3 MFC set to  0.000000
5/7/2012	10:07:09 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:07:09 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:07:09 AM	Tube furnace set to 0
5/7/2012	10:07:39 AM	Helium valve closed
5/7/2012	10:07:39 AM	H2 valve closed
5/7/2012	10:07:39 AM	BCl3 valve closed
5/7/2012	10:07:39 AM	PH3 valve closed
5/7/2012	10:07:39 AM	SiCl4 pre valve closed
5/7/2012	10:07:39 AM	SiCl4 post valve closed
5/7/2012	10:07:39 AM	Bypass valve closed
5/7/2012	10:07:39 AM	Bubbler valve closed
5/7/2012	10:07:39 AM	Main Vac valve opened
5/7/2012	10:07:39 AM	Helium MFC set to  0.000000
5/7/2012	10:07:39 AM	H2 MFC set to  0.000000
5/7/2012	10:07:39 AM	BCl3 MFC set to  0.000000
5/7/2012	10:07:39 AM	PH3 MFC set to  0.000000
5/7/2012	10:07:39 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:07:39 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:07:39 AM	Tube furnace set to 0
5/7/2012	10:08:09 AM	H2 valve closed
5/7/2012	10:08:09 AM	BCl3 valve closed
5/7/2012	10:08:09 AM	PH3 valve closed
5/7/2012	10:08:09 AM	SiCl4 pre valve closed
5/7/2012	10:08:09 AM	SiCl4 post valve closed
5/7/2012	10:08:09 AM	Bypass valve closed
5/7/2012	10:08:09 AM	Bubbler valve closed
5/7/2012	10:08:09 AM	Helium valve opened
5/7/2012	10:08:09 AM	Main Vac valve opened
5/7/2012	10:08:09 AM	Helium MFC set to  20.000000
5/7/2012	10:08:09 AM	H2 MFC set to  0.000000
5/7/2012	10:08:09 AM	BCl3 MFC set to  0.000000
5/7/2012	10:08:09 AM	PH3 MFC set to  0.000000
5/7/2012	10:08:09 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:08:09 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:08:09 AM	Tube furnace set to 0
5/7/2012	10:08:40 AM	Helium valve closed
5/7/2012	10:08:40 AM	H2 valve closed
5/7/2012	10:08:40 AM	BCl3 valve closed
5/7/2012	10:08:40 AM	PH3 valve closed
5/7/2012	10:08:40 AM	SiCl4 pre valve closed
5/7/2012	10:08:40 AM	SiCl4 post valve closed
5/7/2012	10:08:40 AM	Bypass valve closed
5/7/2012	10:08:40 AM	Bubbler valve closed
5/7/2012	10:08:40 AM	Main Vac valve opened
5/7/2012	10:08:40 AM	Helium MFC set to  0.000000
5/7/2012	10:08:40 AM	H2 MFC set to  0.000000
5/7/2012	10:08:40 AM	BCl3 MFC set to  0.000000
5/7/2012	10:08:40 AM	PH3 MFC set to  0.000000
5/7/2012	10:08:40 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:08:40 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:08:40 AM	Tube furnace set to 0
5/7/2012	10:09:10 AM	H2 valve closed
5/7/2012	10:09:10 AM	BCl3 valve closed
5/7/2012	10:09:10 AM	PH3 valve closed
5/7/2012	10:09:10 AM	SiCl4 pre valve closed
5/7/2012	10:09:10 AM	SiCl4 post valve closed
5/7/2012	10:09:10 AM	Bypass valve closed
5/7/2012	10:09:10 AM	Bubbler valve closed
5/7/2012	10:09:10 AM	Helium valve opened
5/7/2012	10:09:10 AM	Main Vac valve opened
5/7/2012	10:09:10 AM	Helium MFC set to  20.000000
5/7/2012	10:09:10 AM	H2 MFC set to  0.000000
5/7/2012	10:09:10 AM	BCl3 MFC set to  0.000000
5/7/2012	10:09:10 AM	PH3 MFC set to  0.000000
5/7/2012	10:09:10 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:09:10 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:09:10 AM	Tube furnace set to 0
5/7/2012	10:09:40 AM	Helium valve closed
5/7/2012	10:09:40 AM	H2 valve closed
5/7/2012	10:09:40 AM	BCl3 valve closed
5/7/2012	10:09:40 AM	PH3 valve closed
5/7/2012	10:09:40 AM	SiCl4 pre valve closed
5/7/2012	10:09:40 AM	SiCl4 post valve closed
5/7/2012	10:09:40 AM	Bypass valve closed
5/7/2012	10:09:40 AM	Bubbler valve closed
5/7/2012	10:09:40 AM	Main Vac valve opened
5/7/2012	10:09:40 AM	Helium MFC set to  0.000000
5/7/2012	10:09:40 AM	H2 MFC set to  0.000000
5/7/2012	10:09:40 AM	BCl3 MFC set to  0.000000
5/7/2012	10:09:40 AM	PH3 MFC set to  0.000000
5/7/2012	10:09:40 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:09:40 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:09:40 AM	Tube furnace set to 0
5/7/2012	10:10:10 AM	H2 valve closed
5/7/2012	10:10:10 AM	BCl3 valve closed
5/7/2012	10:10:10 AM	PH3 valve closed
5/7/2012	10:10:10 AM	SiCl4 pre valve closed
5/7/2012	10:10:10 AM	SiCl4 post valve closed
5/7/2012	10:10:10 AM	Bypass valve closed
5/7/2012	10:10:10 AM	Bubbler valve closed
5/7/2012	10:10:10 AM	Helium valve opened
5/7/2012	10:10:10 AM	Main Vac valve opened
5/7/2012	10:10:10 AM	Helium MFC set to  20.000000
5/7/2012	10:10:10 AM	H2 MFC set to  0.000000
5/7/2012	10:10:10 AM	BCl3 MFC set to  0.000000
5/7/2012	10:10:10 AM	PH3 MFC set to  0.000000
5/7/2012	10:10:10 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:10:10 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:10:10 AM	Tube furnace set to 0
5/7/2012	10:10:40 AM	Helium valve closed
5/7/2012	10:10:40 AM	H2 valve closed
5/7/2012	10:10:40 AM	BCl3 valve closed
5/7/2012	10:10:41 AM	PH3 valve closed
5/7/2012	10:10:41 AM	SiCl4 pre valve closed
5/7/2012	10:10:41 AM	SiCl4 post valve closed
5/7/2012	10:10:41 AM	Bypass valve closed
5/7/2012	10:10:41 AM	Bubbler valve closed
5/7/2012	10:10:41 AM	Main Vac valve opened
5/7/2012	10:10:41 AM	Helium MFC set to  0.000000
5/7/2012	10:10:41 AM	H2 MFC set to  0.000000
5/7/2012	10:10:41 AM	BCl3 MFC set to  0.000000
5/7/2012	10:10:41 AM	PH3 MFC set to  0.000000
5/7/2012	10:10:41 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:10:41 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:10:41 AM	Tube furnace set to 0
5/7/2012	10:11:11 AM	H2 valve closed
5/7/2012	10:11:11 AM	BCl3 valve closed
5/7/2012	10:11:11 AM	PH3 valve closed
5/7/2012	10:11:11 AM	SiCl4 pre valve closed
5/7/2012	10:11:11 AM	SiCl4 post valve closed
5/7/2012	10:11:11 AM	Bypass valve closed
5/7/2012	10:11:11 AM	Bubbler valve closed
5/7/2012	10:11:11 AM	Helium valve opened
5/7/2012	10:11:11 AM	Main Vac valve opened
5/7/2012	10:11:11 AM	Helium MFC set to  20.000000
5/7/2012	10:11:11 AM	H2 MFC set to  0.000000
5/7/2012	10:11:11 AM	BCl3 MFC set to  0.000000
5/7/2012	10:11:11 AM	PH3 MFC set to  0.000000
5/7/2012	10:11:11 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:11:11 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:11:11 AM	Tube furnace set to 0
5/7/2012	10:11:41 AM	Helium valve closed
5/7/2012	10:11:41 AM	H2 valve closed
5/7/2012	10:11:41 AM	BCl3 valve closed
5/7/2012	10:11:41 AM	PH3 valve closed
5/7/2012	10:11:41 AM	SiCl4 pre valve closed
5/7/2012	10:11:41 AM	SiCl4 post valve closed
5/7/2012	10:11:41 AM	Bypass valve closed
5/7/2012	10:11:41 AM	Bubbler valve closed
5/7/2012	10:11:41 AM	Main Vac valve opened
5/7/2012	10:11:41 AM	Helium MFC set to  0.000000
5/7/2012	10:11:41 AM	H2 MFC set to  0.000000
5/7/2012	10:11:41 AM	BCl3 MFC set to  0.000000
5/7/2012	10:11:41 AM	PH3 MFC set to  0.000000
5/7/2012	10:11:41 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:11:41 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:11:41 AM	Tube furnace set to 0
5/7/2012	10:12:11 AM	H2 valve closed
5/7/2012	10:12:11 AM	BCl3 valve closed
5/7/2012	10:12:11 AM	PH3 valve closed
5/7/2012	10:12:11 AM	SiCl4 pre valve closed
5/7/2012	10:12:11 AM	SiCl4 post valve closed
5/7/2012	10:12:11 AM	Bypass valve closed
5/7/2012	10:12:11 AM	Bubbler valve closed
5/7/2012	10:12:11 AM	Helium valve opened
5/7/2012	10:12:11 AM	Main Vac valve opened
5/7/2012	10:12:11 AM	Helium MFC set to  20.000000
5/7/2012	10:12:11 AM	H2 MFC set to  0.000000
5/7/2012	10:12:11 AM	BCl3 MFC set to  0.000000
5/7/2012	10:12:11 AM	PH3 MFC set to  0.000000
5/7/2012	10:12:11 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:12:11 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:12:11 AM	Tube furnace set to 0
5/7/2012	10:12:41 AM	Helium valve closed
5/7/2012	10:12:41 AM	H2 valve closed
5/7/2012	10:12:41 AM	BCl3 valve closed
5/7/2012	10:12:41 AM	PH3 valve closed
5/7/2012	10:12:41 AM	SiCl4 pre valve closed
5/7/2012	10:12:41 AM	SiCl4 post valve closed
5/7/2012	10:12:41 AM	Bypass valve closed
5/7/2012	10:12:41 AM	Bubbler valve closed
5/7/2012	10:12:41 AM	Main Vac valve opened
5/7/2012	10:12:41 AM	Helium MFC set to  0.000000
5/7/2012	10:12:41 AM	H2 MFC set to  0.000000
5/7/2012	10:12:41 AM	BCl3 MFC set to  0.000000
5/7/2012	10:12:41 AM	PH3 MFC set to  0.000000
5/7/2012	10:12:41 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:12:41 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:12:42 AM	Tube furnace set to 0
5/7/2012	10:12:43 AM	Run finished at 10:12 AM
5/7/2012	10:12:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/7/2012	10:14:24 AM	Main Vac valve closed
5/7/2012	10:14:34 AM	Main Vac valve opened
5/7/2012	10:19:18 AM	Recipe started at 10:19 AM
5/7/2012	10:19:18 AM	Helium valve closed
5/7/2012	10:19:18 AM	H2 valve closed
5/7/2012	10:19:18 AM	BCl3 valve closed
5/7/2012	10:19:18 AM	PH3 valve closed
5/7/2012	10:19:18 AM	SiCl4 pre valve closed
5/7/2012	10:19:18 AM	SiCl4 post valve closed
5/7/2012	10:19:18 AM	Main Vac valve closed
5/7/2012	10:19:18 AM	Bypass valve closed
5/7/2012	10:19:18 AM	Bubbler valve closed
5/7/2012	10:19:18 AM	Helium MFC set to  0.000000
5/7/2012	10:19:18 AM	H2 MFC set to  0.000000
5/7/2012	10:19:18 AM	BCl3 MFC set to  0.000000
5/7/2012	10:19:18 AM	PH3 MFC set to  0.000000
5/7/2012	10:19:18 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:19:18 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:19:18 AM	Tube furnace set to 0
5/7/2012	10:19:21 AM	Helium valve closed
5/7/2012	10:19:21 AM	BCl3 valve closed
5/7/2012	10:19:21 AM	PH3 valve closed
5/7/2012	10:19:21 AM	SiCl4 pre valve closed
5/7/2012	10:19:21 AM	SiCl4 post valve closed
5/7/2012	10:19:21 AM	Main Vac valve closed
5/7/2012	10:19:21 AM	Bypass valve closed
5/7/2012	10:19:21 AM	Bubbler valve closed
5/7/2012	10:19:21 AM	H2 valve opened
5/7/2012	10:19:21 AM	Helium MFC set to  0.000000
5/7/2012	10:19:21 AM	H2 MFC set to  500.000000
5/7/2012	10:19:21 AM	BCl3 MFC set to  0.000000
5/7/2012	10:19:21 AM	PH3 MFC set to  0.000000
5/7/2012	10:19:21 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:19:21 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:19:21 AM	Tube furnace set to 0
5/7/2012	10:20:38 AM	Helium valve closed
5/7/2012	10:20:38 AM	BCl3 valve closed
5/7/2012	10:20:38 AM	PH3 valve closed
5/7/2012	10:20:38 AM	SiCl4 pre valve closed
5/7/2012	10:20:38 AM	SiCl4 post valve closed
5/7/2012	10:20:38 AM	Main Vac valve closed
5/7/2012	10:20:38 AM	Bypass valve closed
5/7/2012	10:20:38 AM	H2 valve opened
5/7/2012	10:20:38 AM	Bubbler valve opened
5/7/2012	10:20:38 AM	Helium MFC set to  0.000000
5/7/2012	10:20:38 AM	H2 MFC set to  500.000000
5/7/2012	10:20:38 AM	BCl3 MFC set to  0.000000
5/7/2012	10:20:38 AM	PH3 MFC set to  0.000000
5/7/2012	10:20:38 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:20:38 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:20:38 AM	Tube furnace set to 0
5/7/2012	10:20:39 AM	Helium valve closed
5/7/2012	10:20:39 AM	BCl3 valve closed
5/7/2012	10:20:39 AM	PH3 valve closed
5/7/2012	10:20:39 AM	SiCl4 pre valve closed
5/7/2012	10:20:39 AM	SiCl4 post valve closed
5/7/2012	10:20:39 AM	Main Vac valve closed
5/7/2012	10:20:39 AM	Bypass valve closed
5/7/2012	10:20:39 AM	H2 valve opened
5/7/2012	10:20:39 AM	Bubbler valve opened
5/7/2012	10:20:39 AM	Helium MFC set to  0.000000
5/7/2012	10:20:39 AM	H2 MFC set to  500.000000
5/7/2012	10:20:39 AM	BCl3 MFC set to  0.000000
5/7/2012	10:20:39 AM	PH3 MFC set to  0.000000
5/7/2012	10:20:39 AM	SiCl4 MFC set to  0.000000
5/7/2012	10:20:39 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:20:39 AM	Tube furnace set to 1000
5/7/2012	10:40:39 AM	Helium valve closed
5/7/2012	10:40:39 AM	BCl3 valve closed
5/7/2012	10:40:39 AM	PH3 valve closed
5/7/2012	10:40:39 AM	SiCl4 pre valve closed
5/7/2012	10:40:39 AM	SiCl4 post valve closed
5/7/2012	10:40:39 AM	Main Vac valve closed
5/7/2012	10:40:39 AM	Bypass valve closed
5/7/2012	10:40:39 AM	H2 valve opened
5/7/2012	10:40:39 AM	Bubbler valve opened
5/7/2012	10:40:39 AM	Helium MFC set to  0.000000
5/7/2012	10:40:39 AM	H2 MFC set to  500.000000
5/7/2012	10:40:39 AM	BCl3 MFC set to  1.000000
5/7/2012	10:40:39 AM	PH3 MFC set to  0.000000
5/7/2012	10:40:39 AM	SiCl4 MFC set to  50.000000
5/7/2012	10:40:39 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	10:40:40 AM	Tube furnace set to 1000
5/7/2012	11:00:40 AM	Helium valve closed
5/7/2012	11:00:40 AM	BCl3 valve closed
5/7/2012	11:00:40 AM	PH3 valve closed
5/7/2012	11:00:40 AM	SiCl4 pre valve closed
5/7/2012	11:00:40 AM	SiCl4 post valve closed
5/7/2012	11:00:40 AM	Main Vac valve closed
5/7/2012	11:00:40 AM	Bypass valve closed
5/7/2012	11:00:40 AM	H2 valve opened
5/7/2012	11:00:40 AM	Bubbler valve opened
5/7/2012	11:00:40 AM	Helium MFC set to  0.000000
5/7/2012	11:00:40 AM	H2 MFC set to  500.000000
5/7/2012	11:00:40 AM	BCl3 MFC set to  0.000000
5/7/2012	11:00:40 AM	PH3 MFC set to  0.000000
5/7/2012	11:00:40 AM	SiCl4 MFC set to  0.000000
5/7/2012	11:00:40 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	11:00:40 AM	Tube furnace set to 750
5/7/2012	11:05:40 AM	H2 valve closed
5/7/2012	11:05:40 AM	BCl3 valve closed
5/7/2012	11:05:40 AM	PH3 valve closed
5/7/2012	11:05:40 AM	SiCl4 pre valve closed
5/7/2012	11:05:40 AM	SiCl4 post valve closed
5/7/2012	11:05:40 AM	Main Vac valve closed
5/7/2012	11:05:40 AM	Bypass valve closed
5/7/2012	11:05:40 AM	Helium valve opened
5/7/2012	11:05:40 AM	Bubbler valve opened
5/7/2012	11:05:40 AM	Helium MFC set to  500.000000
5/7/2012	11:05:40 AM	H2 MFC set to  0.000000
5/7/2012	11:05:40 AM	BCl3 MFC set to  0.000000
5/7/2012	11:05:40 AM	PH3 MFC set to  0.000000
5/7/2012	11:05:40 AM	SiCl4 MFC set to  0.000000
5/7/2012	11:05:40 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	11:05:40 AM	Tube furnace set to 0
5/7/2012	11:25:40 AM	Helium valve closed
5/7/2012	11:25:40 AM	H2 valve closed
5/7/2012	11:25:40 AM	BCl3 valve closed
5/7/2012	11:25:40 AM	PH3 valve closed
5/7/2012	11:25:40 AM	SiCl4 pre valve closed
5/7/2012	11:25:40 AM	SiCl4 post valve closed
5/7/2012	11:25:40 AM	Main Vac valve closed
5/7/2012	11:25:40 AM	Bypass valve closed
5/7/2012	11:25:40 AM	Bubbler valve closed
5/7/2012	11:25:40 AM	Helium MFC set to  0.000000
5/7/2012	11:25:40 AM	H2 MFC set to  0.000000
5/7/2012	11:25:40 AM	BCl3 MFC set to  0.000000
5/7/2012	11:25:40 AM	PH3 MFC set to  0.000000
5/7/2012	11:25:40 AM	SiCl4 MFC set to  0.000000
5/7/2012	11:25:40 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	11:25:40 AM	Tube furnace set to 0
5/7/2012	11:25:41 AM	Run finished at 11:25 AM
5/7/2012	11:38:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2012	11:38:26 AM	Recipe started at 11:38 AM
5/7/2012	11:38:26 AM	Helium valve closed
5/7/2012	11:38:26 AM	H2 valve closed
5/7/2012	11:38:26 AM	BCl3 valve closed
5/7/2012	11:38:26 AM	PH3 valve closed
5/7/2012	11:38:26 AM	SiCl4 pre valve closed
5/7/2012	11:38:26 AM	SiCl4 post valve closed
5/7/2012	11:38:26 AM	Main Vac valve closed
5/7/2012	11:38:26 AM	Bypass valve closed
5/7/2012	11:38:26 AM	Bubbler valve closed
5/7/2012	11:38:26 AM	Helium MFC set to  0.000000
5/7/2012	11:38:26 AM	H2 MFC set to  0.000000
5/7/2012	11:38:26 AM	BCl3 MFC set to  0.000000
5/7/2012	11:38:26 AM	PH3 MFC set to  0.000000
5/7/2012	11:38:26 AM	SiCl4 MFC set to  0.000000
5/7/2012	11:38:26 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	11:38:26 AM	Tube furnace set to 0
5/7/2012	11:38:29 AM	H2 valve closed
5/7/2012	11:38:29 AM	BCl3 valve closed
5/7/2012	11:38:29 AM	PH3 valve closed
5/7/2012	11:38:29 AM	SiCl4 pre valve closed
5/7/2012	11:38:29 AM	SiCl4 post valve closed
5/7/2012	11:38:29 AM	Main Vac valve closed
5/7/2012	11:38:29 AM	Bypass valve closed
5/7/2012	11:38:29 AM	Bubbler valve closed
5/7/2012	11:38:29 AM	Helium valve opened
5/7/2012	11:38:29 AM	Helium MFC set to  500.000000
5/7/2012	11:38:29 AM	H2 MFC set to  0.000000
5/7/2012	11:38:29 AM	BCl3 MFC set to  0.000000
5/7/2012	11:38:29 AM	PH3 MFC set to  0.000000
5/7/2012	11:38:29 AM	SiCl4 MFC set to  0.000000
5/7/2012	11:38:29 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	11:38:30 AM	Tube furnace set to 0
5/7/2012	11:38:31 AM	Helium valve closed
5/7/2012	11:38:31 AM	H2 valve closed
5/7/2012	11:38:31 AM	BCl3 valve closed
5/7/2012	11:38:31 AM	PH3 valve closed
5/7/2012	11:38:31 AM	SiCl4 pre valve closed
5/7/2012	11:38:31 AM	SiCl4 post valve closed
5/7/2012	11:38:31 AM	Main Vac valve closed
5/7/2012	11:38:31 AM	Bypass valve closed
5/7/2012	11:38:31 AM	Bubbler valve closed
5/7/2012	11:38:31 AM	Helium MFC set to  0.000000
5/7/2012	11:38:31 AM	H2 MFC set to  0.000000
5/7/2012	11:38:31 AM	BCl3 MFC set to  0.000000
5/7/2012	11:38:31 AM	PH3 MFC set to  0.000000
5/7/2012	11:38:31 AM	SiCl4 MFC set to  0.000000
5/7/2012	11:38:31 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	11:38:31 AM	Tube furnace set to 0
5/7/2012	11:38:32 AM	Run finished at 11:38 AM
5/7/2012	11:38:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/7/2012	11:41:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/7/2012	11:41:42 AM	Recipe started at 11:41 AM
5/7/2012	11:41:42 AM	Helium valve closed
5/7/2012	11:41:42 AM	H2 valve closed
5/7/2012	11:41:42 AM	BCl3 valve closed
5/7/2012	11:41:42 AM	PH3 valve closed
5/7/2012	11:41:42 AM	SiCl4 pre valve closed
5/7/2012	11:41:42 AM	SiCl4 post valve closed
5/7/2012	11:41:42 AM	Main Vac valve closed
5/7/2012	11:41:42 AM	Bubbler valve closed
5/7/2012	11:41:42 AM	Bypass valve opened
5/7/2012	11:41:42 AM	Helium MFC set to  0.000000
5/7/2012	11:41:42 AM	H2 MFC set to  0.000000
5/7/2012	11:41:42 AM	BCl3 MFC set to  0.000000
5/7/2012	11:41:42 AM	PH3 MFC set to  0.000000
5/7/2012	11:41:42 AM	SiCl4 MFC set to  0.000000
5/7/2012	11:41:42 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	11:41:42 AM	Tube furnace set to 0
5/7/2012	11:42:47 AM	Helium valve closed
5/7/2012	11:42:47 AM	H2 valve closed
5/7/2012	11:42:47 AM	BCl3 valve closed
5/7/2012	11:42:47 AM	PH3 valve closed
5/7/2012	11:42:47 AM	SiCl4 pre valve closed
5/7/2012	11:42:47 AM	SiCl4 post valve closed
5/7/2012	11:42:47 AM	Main Vac valve closed
5/7/2012	11:42:47 AM	Bubbler valve closed
5/7/2012	11:42:47 AM	Bypass valve opened
5/7/2012	11:42:47 AM	Helium MFC set to  0.000000
5/7/2012	11:42:47 AM	H2 MFC set to  0.000000
5/7/2012	11:42:47 AM	BCl3 MFC set to  0.000000
5/7/2012	11:42:47 AM	PH3 MFC set to  0.000000
5/7/2012	11:42:47 AM	SiCl4 MFC set to  0.000000
5/7/2012	11:42:47 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	11:42:47 AM	Tube furnace set to 0
5/7/2012	11:43:47 AM	Helium valve closed
5/7/2012	11:43:47 AM	H2 valve closed
5/7/2012	11:43:47 AM	BCl3 valve closed
5/7/2012	11:43:47 AM	PH3 valve closed
5/7/2012	11:43:47 AM	SiCl4 pre valve closed
5/7/2012	11:43:47 AM	SiCl4 post valve closed
5/7/2012	11:43:47 AM	Bypass valve closed
5/7/2012	11:43:47 AM	Bubbler valve closed
5/7/2012	11:43:47 AM	Main Vac valve opened
5/7/2012	11:43:47 AM	Helium MFC set to  0.000000
5/7/2012	11:43:47 AM	H2 MFC set to  0.000000
5/7/2012	11:43:47 AM	BCl3 MFC set to  0.000000
5/7/2012	11:43:47 AM	PH3 MFC set to  0.000000
5/7/2012	11:43:47 AM	SiCl4 MFC set to  0.000000
5/7/2012	11:43:47 AM	Bypass solenoid MFC set to  0.000000
5/7/2012	11:43:47 AM	Tube furnace set to 0
5/7/2012	11:43:48 AM	Run finished at 11:43 AM
5/7/2012	11:43:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
